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Domestic first! Wanchang Enterprise: High-energy ion injection machine passes the key ring of the chip manufacturing by customer

via:IT之家     time:2021/12/28 9:01:09     readed:146

IT Home December 27 news, Wanye Enterprises today reply to investors in the Shanghai E interactive platform, the company's Kay Tong's high-energy ion implantation machine has successfully verified and complete the acceptance. This is the first time the domestic high-energy ion injection machine is first verified by the wafer factory.

IT House understands that the ion implanter is a key equipment in chip manufacturing. In the chip manufacturing process, it is necessary to incorporate different types of elements to change the electrical properties of the material in a predetermined manner. These elements are accelerated to a predetermined energy in the form of electrical ions and injecting into a particular semiconductor material. The ion implantation machine is to perform this. Chip manufacturing apparatus for doping processes.

The high-energy ion implantation machine is the largest type of technical difficulty in the ion injection machine. For a long time, because of its great research and development difficulty and higher industry competition barriers, "Zhuoliangmao" in the field of ion injection machine is known as the key one ring of my country's integrated circuit manufacturing equipment industry chain.

Kai Shitong official website showed that Shanghai Kai Shipong Semiconductor Co., Ltd. was established in Zhangjiang in April 2009, and the five internationally renowned ion injection equipment experts headed by the International Ion Injection Technology Association - Dr. Chen Wei. The group has sold more than 1,000 ionic injection machines.

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